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Quantum dot qubit using High NA EUV lithography | imec

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Press release World first: imec presents quantum dot qubit device using High NA EUV lithography The most advanced lithography system, crucial for future advanced memory and computer chips, will play a key role in scaling up quantum technology  LEUVEN (Belgium), MAY 19, 2026 — This week, at ITF World , imec, a world-leading research and innovation hub in advanced semiconductor technologies, presents a world first: a quantum dot qubit device fabricated using High NA EUV lithography . This achievement marks a milestone toward the industrial scaling of more reliable qubits , the basic computational units of quantum computers. To the best of our knowledge, this is the first integrated hardware device created using High NA EUV lithography.  For specific, complex computational problems, such as developing new drugs or simulating physical processes, a quantum computer could perform exponentially better than classical computers.…

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